Ion beam trimmer
Buyer: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Published
- 3 September 2026
- Place of performance
- Espoo, FI1B1
- Procedure
- Open procedure
- Lots
- 1
- Notice number
- 00609219-2026
- Reference
- d7727dd7-a563-44c8-aec4-b0cd6b2af621
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.
Award criteria
- Price — The evaluation of the tenders is described in section 'Grounds for decision'.
- Quality — The evaluation of the tenders is described in section 'Grounds for decision'.
Awards
| Awarded to | Amount | Date |
|---|---|---|
| Sales Department | €1,256,300 | — |
Official publications
- TED · 00609219-2026 · 3 September 2026
- OJS · 170/2026 · 3 September 2026
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Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is TEKNOLOGIAN TUTKIMUSKESKUS VTT OY (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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