Silicon Austria Labs –Deep Ultraviolet (DUV) Lithography Systems
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Amounts and figures
Description
Ziel des gegenständlichen Vergabeverfahrens ist, den im Zuge des Vergabeverfahrens ermittelten Bestbieter mit der Lieferung und Installation eines Deep Ultraviolet (DUV) KrF-based exposure stepper (kurz „Stepper“) für die Silicon Austria Labs GmbH zu beauftragen.
Award criteria
| Type | Criterion | Weight |
|---|---|---|
| Quality | Delivery and installation time | — |
| Quality | Warranty of functionality period | — |
| Price | Price of the Deep Ultraviolet (DUV) Lithography Systems | — |
Participation requirements
- Gemäß den entsprechenden nationalen vergaberechtlichen Vorgaben.
Performance conditions
- Siehe Ausschreibungsunterlagen.
Official publications
| Medium | Reference | Date |
|---|---|---|
| TED | 00122202-2025 | 24 February 2025 |
| OJS | 38/2025 | 24 February 2025 |
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- The contracting authority is Silicon Austria Labs GmbH (European Union).
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