Prior Information Notice – Maskless Laser Lithography System
Buyer: Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik
- Published
- 11 June 2026
- Estimated value
- €510,000
- Lots
- 1
- Notice number
- 00401237-2026
- Official source
- Official source
CPV codes
- 42990000Miscellaneous special-purpose machinery
Description
The Ferdinand-Braun-Institut (FBH) plans to procure a high-performance maskless laser lithography system within the framework of the EU-funded APECS programme. The system will be used for high-resolution patterning of semiconductor wafers to support the development of advanced heterointegration technologies, including InP- and GaAs-based chiplets. It is intended to enable rapid prototyping as well as efficient processing of wafers with diameters up to 200 mm. The equipment must provide sub-micron precision combined with high throughput and support modern multi-beam laser writing technologies. It will be installed in a cleanroom environment and must comply with ISO class 5 requirements. The procurement procedure is planned for 2026.
Official publications
- TED · 00401237-2026 · 11 June 2026
- OJS · 111/2026 · 11 June 2026
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Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is €510,000.
- Who is the buyer of this tender?
- The contracting authority is Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik (European Union).
- How can I bid for public tenders in the European Union?
- Bids are submitted through the official public procurement portal in the European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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