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Awarded European Union SuppliesFramework agreement

Accord-cadre de fourniture de groupe de pompage

Buyer: CEA/Grenoble

Published
30 January 2025
Place of performance
Grenoble, FRK24
Procedure
Open procedure
Lots
1
Notice number
00066283-2025
Reference
a09b8e8b-b513-4dec-a829-48cd7bb35177
Official source
Official source

CPV codes

Description

Le CEA de Grenoble souhaite mettre en place un accord-cadre à marchés subséquents multi-attributaires permettant la fourniture de groupe de pompage. Ces périphériques pourront être rattachés à l'un de ces ateliers : dépôt (PVD process, PVD pre-clean...), gravure (oxide Etch, Silicon Etch...), epitaxie, implanteur, traitement thermiques, recuit rapide... Les pompes devront être de type sèche et disposer d'un mode idle.

Award criteria

Awards

Awarded toAmountDate
Pfeiffer Vacuum €1
EDWARDS SAS €1
EBARA Precision Machinery Europe €1

Official publications

Other tenders from CEA/Grenoble

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Data collected from official public procurement sources. Amounts as published by the buyer.