LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots
Education Procurement Service (EPS)
Closed. Submission deadline: 17 July 2026. Estimated value: €3,300,000.
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Amounts and figures
Description
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced plasma etching system capable of etching for polysilicon poly-Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 2 Plasma Etcher Metals Piezoelectrics, advanced plasma etching system capable of etching for aluminium Al and alloys molybdenum Mo aluminium scandium nitride AlScN thin films using medium high-density plasma processes. Lot 3 Plasma Etcher Slow and Controllable Rate Atomic Layer Etch for Silicon Dielectrics, advanced plasma etching system capable of both conventional high-rate etching and slow and controllable rate atomic layer etching for silicon Si silicon dioxide SiO2 silicon nitride SiN thin films using med…
Lots (4)
| Lot | Description | CPV code | Amount |
|---|---|---|---|
| 1 | Plasma Etcher ,Silicon ,Dielectrics | 38000000 Laboratory, optical and precision equipments (excl. glasses) | €3,300,000 |
| 2 | Plasma Etcher ,Metals ,Piezoelectrics | 38000000 Laboratory, optical and precision equipments (excl. glasses) | €3,300,000 |
| 3 | Plasma Etcher ,Slow and Controllable Rate ,Atomic Layer Etch for Silicon , Dielectrics | 38000000 Laboratory, optical and precision equipments (excl. glasses) | €3,300,000 |
| 4 | Plasma Deposition ,PECVD | 38000000 Laboratory, optical and precision equipments (excl. glasses) | €3,300,000 |
Official publications
| Medium | Reference | Date |
|---|---|---|
| TED | 00415187-2026 | 17 June 2026 |
| OJS | 115/2026 | 17 June 2026 |
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 17 July 2026, 12:00. Check the official source, as dates can be modified.
- What is the estimated value of this tender?
- The estimated value published by the buyer is €3,300,000.
- Who is the buyer of this tender?
- The contracting authority is Education Procurement Service (EPS) (European Union).
- How can I bid for public tenders in the European Union?
- Bids are submitted through the official public procurement portal in the European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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