LA2972C- UCC- RFT for the Supply of a High Aspect Ratio Etcher
Education Procurement Service (EPS)
Awarded to KLA Corporation for €900,000.
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Amounts and figures
Description
Tenders are sought for the supply delivery, installation and commissioning of a High Aspect Ratio Etcher for University College Cork. The new etcher will enhance the capabilities at the Tyndall National Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced etching system capable of performing high aspect ratio silicon (Si) etching using the Bosch process. This equipment will be essential for etching deep Si trenches, facilitating the creation of through silicon vias (TSVs) that are critical for heterogeneous integration. The ideal tool will offer precision, reliability, and efficiency to meet the requirements for the etching of both 100mm and 200mm wafers. Vendors with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.
Award criteria
| Type | Criterion | Weight |
|---|---|---|
| Quality | see CFT documents | — |
Awards
| Lot | Awarded to | Amount | Bids received | Date |
|---|---|---|---|---|
| LOT-0001 | KLA Corporation | €900,000 | 2 | 31 January 2025 |
Official publications
| Medium | Reference | Date |
|---|---|---|
| TED | 00628309-2025 | 25 September 2025 |
| OJS | 184/2025 | 25 September 2025 |
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Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is €900,000.
- Who is the buyer of this tender?
- The contracting authority is Education Procurement Service (EPS) (European Union).
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