Magnetron Sputter Deposition Tool
Reference ocds-r6ebe6-0000785458 · Fife Council
Prior notice. Estimated value: £65,000.
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Amounts and figures
Description
Argon-based magnetron sputtering system for sequential deposition of metals. The deposition should be made with a direct current method over up to 4†wafer area. The deposition should also be conformal to features present on the wafers. The ideal system will be employed for academic research and located within a cleanroom micro-fabrication facility.
Official publications
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