XUV Piezo Cluster
Buyer: Universiteit Twente
- Published
- 11 November 2024
- Submission deadline
- 13 January 2025, 11:00
- Estimated value
- €1,900,000
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00683630-2024
- Reference
- a56cdde3-e149-4cd1-97ff-45fdbc4d9957
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
The XUV Optics Group in MESA+ Institute at University of Twente tends to invest in the XUV Piezo Cluster to carry research on piezoelectric film-based sensors and actuators. The aim is to scale up the piezoelectric film coating capabilities to larger substrate dimensions with more advanced process control systems that enable to explore a broader process window. The XUV Piezo Cluster will be used for the deposition of pure metals, metallic oxides and piezoelectric layers onto various substrates to be further processed using photolithography and deposition steps in the MESA+ Nanolab facilities. Brief description of the capabilities is outlined below: The XUV Piezo Cluster shall be capable of processing at least 200 mm diameter substrates. The XUV Piezo Cluster shall include a chamber for deposition of piezoelectric Pb(Zr,Ti)O3 (PZT) layer that acts as the active layer for sensor and actuator applications. The XUV Piezo Cluster shall include a chamber or chambers for deposition of pure metals such as Pt, gold (Au) or conductive metal oxides such as LaNiO3 or SrRuO3 layers. The XUV Piezo Cluster shall have the capability to sputter the typically used Ti, Ta or Cr adhesion lay…
Official publications
- TED · 00683630-2024 · 11 November 2024
- OJS · 219/2024 · 11 November 2024
Other tenders from Universiteit Twente
- Europese Aanbesteding Brokerdienstverlening Inhuur
- European Tender Electron Beam Lithography system
- Brandverzekering
- Vector Network Analyzer
- European Tender Electron Beam Lithography system
- Fotografie
- European Tender Direct Laser Writing system
- Ex Ante Fan Filter Units Nanolab
- Circulair Meubilair
- Market consultation Learning Management System
Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 13 January 2025, 11:00. Check the official source, as dates can be modified.
- What is the estimated value of this tender?
- The estimated value published by the buyer is €1,900,000.
- Who is the buyer of this tender?
- The contracting authority is Universiteit Twente (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
Create a free account and receive new tenders from European Union matching your business, every day.