Stylus profilometer
Buyer: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Published
- 9 December 2024
- Place of performance
- Espoo, FI1B1
- Procedure
- Open procedure
- Lots
- 1
- Notice number
- 00751516-2024
- Reference
- 4e0dbb78-0b11-4763-8f66-ffb84d2ef16b
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
THE OBJECT OF THE TENDER PROCESS The object of the tender process is a Stylus Profilometer for both 200 mm- and 300 mm wafers. The equipment will be used in VTT's microelectronics cleanroom located in Tekniikantie 17 Espoo Finland (VTT's Micronova center for applied micro and nanotechnology). For further information, see https://www.vttresearch.com/en. The tool must be capable of measuring 200- and 300 mm single side polished (SSP), double side polished (DSP)- and SOI silicon wafers as well as glass and fused silica wafers. The technical specification of the object of the tender is described in more detail in Annex 1 of this invitation to tender. The equipment must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the in…
Award criteria
- Price — The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting .
Awards
| Awarded to | Amount | Date |
|---|---|---|
| BlueScientific Ltd | — | — |
| CN Technical Services Ltd | — | — |
Official publications
- TED · 00751516-2024 · 9 December 2024
- OJS · 239/2024 · 9 December 2024
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Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is TEKNOLOGIAN TUTKIMUSKESKUS VTT OY (European Union).
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