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Closed European Union Supplies

Single wafer plasma asher tool

TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Closed. Submission deadline: 20 January 2025.

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Amounts and figures

1
Lots

Description

The object of the tender process is Single wafer plasma asher tool (later also “Equipment”). The procurement object is a new 200 mm Single Wafer Plasma asher tool for the VTT Micronova cleanroom semiconductor front end. The procurement includes a process chamber for Polymer Removal and PR ash. The single-wafer plasma asher tool is for silicon semiconductor front-end, the tool must be compatible with industry-standard cleanroom requirements, including automated wafer handling, welded gas lines with VCR-gasket construction, particle filters, etc., and CE-compliant, with Emergency shutdown, capable processing of 200 mm including the following processes: Polymer removal PR ash (bulk strip, HDIS, Descums) The Single wafer asher tool will be used in silicon photonics devices, quantum devices, radiation detectors, and MEMS devices, which are the main product lines in the research fab. The object of the tender process is described in more detail in the invitation to tender documents.

Award criteria

TypeCriterionWeight
PriceThe criteria on the basis of which tenders are to be compared include the following: PRICE, weighting 100 % The price on the basis of which tenders will be compared against each other is the…100%

Participation requirements

  • The tenderer must have valid liability insurance latest in the beginning of the contract period. The liability insurance must be relevant to the risks…
  • Tenderer must be able to carry out the contract according to the invitation to tender. On VTT’s request, the tenderer commits to provide a statement of…
  • The tenderer commits to provide VTT the information specified in the Act on the Contractor’s Obligations and Liability when Work is Contracted Out (1233/2006)…
  • The supplier undertakes to comply with the business principles set by VTT (Annex 5 “Suppliers Code of Conduct” to the invitation to tender) in order to be a…
  • It is enrolled in the relevant trade registers kept in the Member State of its establishment: It is enrolled in relevant professional registers kept in the…
  • The suitability requirements are to ensure tenderer’s ability to fulfill and perform the procurement. A reference is a previous contract with a reference…

Official publications

MediumReferenceDate
TED 786533-2024 20 December 2024
OJS 248/2024 20 December 2024

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Frequently asked questions

What is the deadline to bid for this tender?
The submission deadline is 20 January 2025, 06:00. Check the official source, as dates can be modified.
Who is the buyer of this tender?
The contracting authority is TEKNOLOGIAN TUTKIMUSKESKUS VTT OY (European Union).
How can I bid for public tenders in the European Union?
Bids are submitted through the official public procurement portal in the European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.

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Data collected from official public procurement sources. Amounts as published by the buyer.