Plasma Ashing System
Buyer: Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften
- Published
- 5 June 2025
- Submission deadline
- 11 July 2025, 12:00
- Place of performance
- Garching, DE21H
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00365129-2025
- Reference
- 5b0523ad-2b6c-48bf-bea6-5c7a87d9e7ea
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection.
Award criteria
- Quality — siehe Vergabeunterlagen.
- Price — siehe Vergabeunterlagen.
Official publications
- TED · 00365129-2025 · 5 June 2025
- OJS · 107/2025 · 5 June 2025
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 11 July 2025, 12:00. Check the official source, as dates can be modified.
- Who is the buyer of this tender?
- The contracting authority is Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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