LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots

Published

27 July 2026

Submission deadline

31 July 2026

Estimated value

€3,300,000

Place of performance

IE052

Procedure

open

Lots

4

Notice number

00516095-2026

Reference

a024c275-b92f-48d9-83b8-52aa370660c8

Official source

Official source

CPV codes

• 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)

Description

Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced plasma etching system capable of etching for polysilicon poly-Si silicon dioxide SiO2 silicon nitride SiN thin films using medium high-density plasma processes. Lot 2 Plasma Etcher Metals Piezoelectrics, advanced plasma etching system capable of etching for aluminium Al and alloys molybdenum Mo aluminium scandium nitride AlScN thin films using medium high-density plasma processes. Lot 3 Plasma Etcher Slow and Controllable Rate Atomic Layer Etch for Silicon Dielectrics, advanced plasma etching system capable of both conventional high-rate etching and slow and controllable rate atomic layer etching for silicon Si silicon dioxide SiO2 silicon nitride SiN thin films using med…

Frequently asked questions

What is the deadline to bid for this tender?

The submission deadline is 31 July 2026. Check the official source, as dates can be modified.

What is the estimated value of this tender?

The estimated value published by the buyer is €3,300,000.

Who is the buyer of this tender?

The contracting authority is Education Procurement Service (EPS) (European Union).