LA3024C RFT for a Direct Write Laser Lithography Tool for University College Cork
Education Procurement Service (EPS)
Awarded to Heidelberg Instruments Mikrotechnik GmbH for €697,230.
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Amounts and figures
Description
Tenders are sought for the supply delivery, installation and commissioning of a Direct Write Laser Lithography Tool for University College Cork. The new lithography tool will enhance the capabilities at the Tyndall National Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced direct write laser lithography tool that is capable of resolving features down to 0.3um. The system should also be capable of grayscale lithography enabling the creation of complex 3D microstructures for advanced research and development applications. This equipment will be essential for filling the gap between our current optical lithography and e-beam lithography capabilities. The ideal tool will offer precision, reliability, and efficiency to meet the requirements for the exposure of samples from coupon size to 200mm wafers. Vendors with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.
Award criteria
| Type | Criterion | Weight |
|---|---|---|
| Quality | See CFT Details | — |
Awards
| Lot | Awarded to | Amount | Bids received | Date |
|---|---|---|---|---|
| LOT-0001 | Heidelberg Instruments Mikrotechnik GmbH | €697,230 | 1 | 11 December 2024 |
Official publications
| Medium | Reference | Date |
|---|---|---|
| TED | 00121046-2025 | 24 February 2025 |
| OJS | 38/2025 | 24 February 2025 |
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Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is €736,000.
- Who is the buyer of this tender?
- The contracting authority is Education Procurement Service (EPS) (European Union).
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- Bids are submitted through the official public procurement portal in the European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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