European Tender Dry Etcher
Buyer: Universiteit Twente
- Published
- 7 October 2024
- Estimated value
- €1,050,000
- Procedure
- Open procedure
- Lots
- 1
- Notice number
- 00600532-2024
- Reference
- 569d9e22-e4f2-49e4-9070-f15ad13d1467
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
The MESA+ Institute will invest in a new Dry Etch tool system to reinforce their state-of-the-art etch capabilities and etch capacity. Applications: The tool must be capable of etching silicon and/or silicon-based materials for a variety of nano- and/or microscale structures with nanometre precision and high wafer-scale uniformity. The tool must be suitable for the etching of silicon-based materials with etch rates of 1 nm/min up to 15 µm/min. The tool must be equipped with reliable end-pointing, also for loadings of < 5% open area (based on 100 mm wafer), using OES or laser interferometry. The required nanometric precision of the tool is defined as the wafer-scale controllability in three-dimensional micro- and nano-machining of silicon and/or silicon-based materials. A uniform plasma density is required for highly adjustable control over the x- and y-dimensions (lateral) upon etching in the z-direction (depth), with an accuracy ± 2 nm using fluor-based chemistries with processes containing the gases Ar, O2, N2, SF6, and C4F8. The required high uniformity of the tool is defined as a uniform plasma ion density across the wafer, providing a uniform etching performance for wafer si…
Award criteria
- Quality — See descriptive document
- Price — See descriptive document
Awards
| Awarded to | Amount | Date |
|---|---|---|
| KLA | — | — |
Official publications
- TED · 00600532-2024 · 7 October 2024
- OJS · 195/2024 · 7 October 2024
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Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is €1,050,000.
- Who is the buyer of this tender?
- The contracting authority is Universiteit Twente (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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