Electron Beam Lithography (EBL) Tool
Buyer: Lunds universitet
- Published
- 7 October 2026
- Submission deadline
- 5 November 2026, 23:59
- Estimated value
- 26,000,000 kr
- Place of performance
- SE224
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00690718-2026
- Reference
- 1bf7679b-da90-4bf7-8c0f-5f566c555c72
- Official source
- Official source
CPV codes
- 38000000Laboratory, optical and precision equipments (excl. glasses)
Description
Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.
Award criteria
- Price
Official publications
- TED · 00690718-2026 · 7 October 2026
- OJS · 194/2026 · 7 October 2026
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 5 November 2026, 23:59. Check the official source, as dates can be modified.
- What is the estimated value of this tender?
- The estimated value published by the buyer is 26,000,000 kr.
- Who is the buyer of this tender?
- The contracting authority is Lunds universitet (European Union).
- How can I bid for public tenders in the European Union?
- Bids are submitted through the official public procurement portal in the European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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