Electron beam lithography (EBL) and laser beam lithography (LBL) systems
Buyer: Jyväskylän yliopisto
- Published
- 17 June 2025
- Place of performance
- FI193
- Procedure
- Open procedure
- Notice number
- 00391306-2025
- Reference
- 5bae275b-d324-4d3f-9874-9ab60e898809
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for research and development of state of the art micro- and nano-scale features requiring high fidelity in patterning and edge smoothness. Contracting authority has a need for high precision and versatile lithography tools for patterning of optical wave guides and lattices, phononic crystals and mechanic resonators; with the goal of investigating quantum phenomena and the interplay between such structures. Contracting authority has a need for the lithography tools to support integration of high fidelity nano-scale features into considerably larger designs, such as microfluidic networks with widths of about 100 um and lengths of several mm. Therefore, contracting authority puts emphasis on the two lithography systems having good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and…
Lots (2)
| Lot | Description | CPV code | Amount |
|---|---|---|---|
| 1 | EBL system | 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas) | — |
| 2 | LBL system | 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas) | — |
Award criteria
- Price — Vertailuhinta
- Quality — Laatupisteytys
- Price — Hintavertailu
Awards
| Awarded to | Amount | Date |
|---|---|---|
| RAITH GmbH | — | — |
| RAITH GmbH | — | — |
Official publications
- TED · 00391306-2025 · 17 June 2025
- OJS · 114/2025 · 17 June 2025
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- The contracting authority is Jyväskylän yliopisto (European Union).
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