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Awarded European Union Supplies

Acquisition d'un cluster à 3 chambres de pulvérisation cathodique pour les besoins de FEMTO-ST

Buyer: CNRS-Délégation Centre-Est

Published
22 August 2025
Place of performance
Besançon, FRC21
Procedure
Open procedure
Lots
1
Notice number
00549410-2025
Reference
ab4e1baf-bd2a-4fbe-a903-ca4d01ffcbb1
Official source
Official source

CPV codes

Description

L’Unité Mixte de Recherche CNRS n°6174 (FEMTO-ST) souhaite acquérir un cluster de dépôt de couches minces par la technique de pulvérisation cathodique. Le cluster complétera la gamme des moyens de déposition de couches minces disponibles dans la centrale de technologique MIMENTO de l’Institut FEMTO-ST, et sera positionné dans une salle blanche, dans la ressource « Dépôts/Traitements thermiques ».

Award criteria

Awards

Awarded toAmountDate
BESTEK €1,210,000

Official publications

Other tenders from CNRS-Délégation Centre-Est

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Data collected from official public procurement sources. Amounts as published by the buyer.