200 mm coating and developing track tool
Buyer: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Published
- 20 May 2025
- Submission deadline
- 16 June 2025, 09:00
- Place of performance
- Espoo, FI1B1
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00323145-2025
- Reference
- e384e74a-e6b3-4e7a-8495-175c1543e1b5
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to …
Award criteria
- Price — See call for tenders
Official publications
- TED · 00323145-2025 · 20 May 2025
- OJS · 96/2025 · 20 May 2025
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 16 June 2025, 09:00. Check the official source, as dates can be modified.
- Who is the buyer of this tender?
- The contracting authority is TEKNOLOGIAN TUTKIMUSKESKUS VTT OY (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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