tender for a batch spray tool
Buyer: Danmarks Tekniske Universitet - DTU
- Published
- 2 May 2025
- Submission deadline
- 2 June 2025, 08:00
- Estimated value
- €1,100,000
- Place of performance
- DK012
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00285354-2025
- Reference
- 18754cf1-01c6-4d2d-bd89-430d4e5b9e41
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
DTU Nanolab requires one spray tool equipped with ozone, HF, HCl and NH4OH for wafer cleaning purposes. The tool is to be able to handle batch processing (up to 25 wafers per run). The tool will be used in our ISO 14644-1 Class 4 and 5 clean room. The tool will be used by many different users with diverse backgrounds, which means that operator safety is an important aspect. Another important aspect is the ease of use with special attention on software operation and setup change for different wafer sizes. Please see Appendix 1 Requirement specification for further information.
Award criteria
- Price — See instructions to tenderers
- Quality — See instructions to tenderers
Official publications
- TED · 00285354-2025 · 2 May 2025
- OJS · 85/2025 · 2 May 2025
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 2 June 2025, 08:00. Check the official source, as dates can be modified.
- What is the estimated value of this tender?
- The estimated value published by the buyer is €1,100,000.
- Who is the buyer of this tender?
- The contracting authority is Danmarks Tekniske Universitet - DTU (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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