Silicon deep reactive ion etcher (Si DRIE)
Buyer: Danmarks Tekniske Universitet - DTU
- Published
- 9 July 2025
- Submission deadline
- 19 September 2025, 21:55
- Place of performance
- Lyngby, DK012
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00446371-2025
- Reference
- 050f32be-c45a-4dcc-b4e1-b455cc993aee
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
- 51430000Servicios de instalación de equipo técnico de laboratorio
Description
DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients.
Award criteria
- Price — The price to be evaluated is the total price for the machine as well as the options, but not voluntary option, specified in Appendix 2 – Prices. DTU uses a linear point scale model to evaluate the…
- Quality — The sub-criteria “Functionality and performance” is based on the Tenderer’s specifications in Appendix 1 – Requirement Specification.
- Quality — Evaluation of the sub-criteria “Quality of submitted samples” will be made based on an evaluation of the received samples.
Official publications
- TED · 00446371-2025 · 9 July 2025
- OJS · 129/2025 · 9 July 2025
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 19 September 2025, 21:55. Check the official source, as dates can be modified.
- Who is the buyer of this tender?
- The contracting authority is Danmarks Tekniske Universitet - DTU (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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