Silicon Deep reactive Ion Etch system and PECVD for dielectric materials
- Published
- 23 August 2024
- Estimated value
- 8,000,000 kr
- Place of performance
- SE232
- Procedure
- Open procedure
- Notice number
- 00506473-2024
- Reference
- 09f29b25-13c3-46f7-9b2b-4677bd6ca8bc
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
This procurement is made on behalf of The Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology. This procurement aims at replacing two of our old processing equipments at Myfab Chalmers, one (1) silicon deep reactive ion etch system (Si DRIE) and one plasma enhanced chemical vapour deposition system (PECVD for dielectric materials) to further consolidate and enhance our processing capabilities.
Lots (4)
| Lot | Description | CPV code | Amount |
|---|---|---|---|
| 1 | General requirements (1) | 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas) | 8,000,000 kr |
| 2 | Tenderer's suitability | 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas) | 8,000,000 kr |
| 3 | Deep reactive Ion Etch system (DRIE) | 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas) | 8,000,000 kr |
| 4 | PECVD for dielectric materials | 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas) | 8,000,000 kr |
Award criteria
- Price — Please refer to section 6.10 in the RFT
- Quality — Please refer to section 7.3.2.4 in the RFT
- Quality — Please refer to section 7.3.2.5 in the RFT
- Quality — Please refer to section 7.3.2.19 in the RFT
- Price — Please refer to section 7.10 in the RFT
- Price — Please refer to section 6.10 in the RFT.
- Price — Please refer to section 6.10 in the RFT.
- Quality — Please refer to section 7.3.2.4 in the RFT.
- Quality — Please refer to section 7.3.2.5 in the RFT.
- Quality — Please refer to section 7.3.2.19 in the RFT.
- Price — Please refer to section 7.10 in the RFT.
- Quality — Plese refer to section 7.3.2.4 in the RFT.
Awards
| Awarded to | Amount | Date |
|---|---|---|
| Plasma-Therm, LLC | — | — |
| Elettrorava S.r.l. | — | — |
| SINGULUS TECHNOLOGIES AG | — | — |
| Samco Inc. | — | — |
| Oxford Instruments GmbH | — | — |
| Plasma Therm Europe | — | — |
| Plasma-Therm, LLC | — | — |
| Elettrorava S.r.l. | — | — |
| SPTS Technologies | — | — |
| SPTS Technologies | — | — |
Official publications
- TED · 00506473-2024 · 23 August 2024
- OJS · 164/2024 · 23 August 2024
Other tenders from Chalmers Tekniska Högskola Aktiebolag
Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is 8,000,000 kr.
- Who is the buyer of this tender?
- The contracting authority is Chalmers Tekniska Högskola Aktiebolag (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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