Silicon Deep reactive Ion Etch system and PECVD for dielectric materials
Chalmers Tekniska Högskola Aktiebolag
Awarded to Oxford Instruments GmbH. Estimated value: 8,000,000 kr.
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Amounts and figures
Description
This procurement is made on behalf of The Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology. This procurement aims at replacing two of our old processing equipments at Myfab Chalmers, one (1) silicon deep reactive ion etch system (Si DRIE) and one plasma enhanced chemical vapour deposition system (PECVD for dielectric materials) to further consolidate and enhance our processing capabilities.
Lots (4)
| Lot | Description | CPV code | Amount |
|---|---|---|---|
| 1 | General requirements (1) | 38000000 Laboratory, optical and precision equipments (excl. glasses) | 8,000,000 kr |
| 2 | Tenderer's suitability | 38000000 Laboratory, optical and precision equipments (excl. glasses) | 8,000,000 kr |
| 3 | Deep reactive Ion Etch system (DRIE) | 38000000 Laboratory, optical and precision equipments (excl. glasses) | 8,000,000 kr |
| 4 | PECVD for dielectric materials | 38000000 Laboratory, optical and precision equipments (excl. glasses) | 8,000,000 kr |
Award criteria
| Type | Criterion | Weight |
|---|---|---|
| Price | Please refer to section 6.10 in the RFT | — |
| Quality | Please refer to section 7.3.2.4 in the RFT | — |
| Quality | Please refer to section 7.3.2.5 in the RFT | — |
| Quality | Please refer to section 7.3.2.19 in the RFT | — |
| Price | Please refer to section 7.10 in the RFT | — |
| Quality | Plese refer to section 7.3.2.4 in the RFT. | — |
| Quality | Plese refer to section 7.3.2.5 in the RFT. | — |
| Quality | Plese refer to section 7.3.2.19 in the RFT. | — |
| Price | Plese refer to section 7.10 in the RFT. | — |
Awards
| Lot | Awarded to | Amount | Bids received | Date |
|---|---|---|---|---|
| 1 | Oxford Instruments GmbH | — | 10 | 7 April 2021 |
| 2 | Oxford Instruments GmbH | — | 10 | 7 April 2021 |
| 3 | Oxford Instruments GmbH | — | 4 | 7 April 2021 |
| 4 | Oxford Instruments GmbH | — | 6 | 7 April 2021 |
Bidders
- Oxford Instruments GmbH
- Plasma-Therm, LLC
- Elettrorava SpA
- SPTS Technologies
- SINGULUS TECHNOLOGIES AG
- Samco Inc.
- Plasma-Therm Europe
Official publications
| Medium | Reference | Date |
|---|---|---|
| TED | 00506473-2024 | 23 August 2024 |
| OJS | 164/2024 | 23 August 2024 |
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Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is 8,000,000 kr.
- Who is the buyer of this tender?
- The contracting authority is Chalmers Tekniska Högskola Aktiebolag (European Union).
- How can I bid for public tenders in the European Union?
- Bids are submitted through the official public procurement portal in the European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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