Process Monitoring Tool
Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Published
- 29 October 2025
- Submission deadline
- 2 December 2025, 10:00
- Place of performance
- DED21
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00713142-2025
- Reference
- a4bb8f76-da0a-40bb-8d54-dc44b1981ae6
- Official source
- Official source
CPV codes
- 42990000Máquinas diversas para usos especiales
- 38500000Aparatos de control y prueba
Description
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.
Award criteria
- Quality — Technische Ausführung/techninal specification
- Price — Preis/price
Official publications
- TED · 00713142-2025 · 29 October 2025
- OJS · 208/2025 · 29 October 2025
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 2 December 2025, 10:00. Check the official source, as dates can be modified.
- Who is the buyer of this tender?
- The contracting authority is Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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