Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool - PR847550-2270-W

Published

18 February 2025

Place of performance

München, DE212

Procedure

Open procedure

Lots

1

Notice number

00107898-2025

Reference

c78fceab-7b8b-44cc-b03c-e01ddaece025

Official source

Official source

CPV codes

• 31712330Semiconductores

Description

Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool

Award criteria

• Quality — TECHNISCHE AUSFÜHRUNG
• Quality — LIEFERFRIST
• Price — Preis

Awards

Official publications

• TED · 00107898-2025 · 18 February 2025
• OJS · 34/2025 · 18 February 2025

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Frequently asked questions

Who is the buyer of this tender?

The contracting authority is Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau (European Union).

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