Plasma-Anlage - PR461710-2590-W
Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau
- Published
- 15 March 2024
- Place of performance
- DE300
- Procedure
- Open procedure
- Lots
- 1
- Notice number
- 00158216-2024
- Reference
- c19fc801-8838-43c6-bca6-467cf3073be2
- Official source
- Official source
CPV codes
- 44113810Tratamiento de superficies
Description
For the improvement of wetting and bonding we are looking for a down-stream plasma tool, where we can apply different reactive gasses to modify the surface without high kinetic bombardment. Semiconductor chips, wafers and substrates will be prepared before bonding to provide defined surface conditions. The plasma treatment should remove oxide or contamination layers from metal surfaces. From dielectric bonding layers oxide or water or hydrate molecules should be removed from the surface. Standard plasma tools are frequently used to remove the surface layer by ion bombardment. We are requesting an atmospheric plasma in a down-stream configuration, which uses ions with lower kinetic energy and will change the surface state rather by chemical reactions than kinetic bombardment.
Award criteria
- Quality
- Price
Awards
| Awarded to | Amount | Date |
|---|---|---|
| ONTOS Equipment Systems, Inc. | — | — |
Official publications
- TED · 00158216-2024 · 15 March 2024
- OJS · 54/2024 · 15 March 2024
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Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau (European Union).
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