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Plasma-Anlage - PR461710-2590-W

Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau

Published
24 January 2024
Submission deadline
22 February 2024
Place of performance
DE300
Procedure
open
Lots
1
Notice number
00048878-2024
Reference
c19fc801-8838-43c6-bca6-467cf3073be2
Official source
Official source

CPV codes

Description

For the improvement of wetting and bonding we are looking for a down-stream plasma tool, where we can apply different reactive gasses to modify the surface without high kinetic bombardment. Semiconductor chips, wafers and substrates will be prepared before bonding to provide defined surface conditions. The plasma treatment should remove oxide or contamination layers from metal surfaces. From dielectric bonding layers oxide or water or hydrate molecules should be removed from the surface. Standard plasma tools are frequently used to remove the surface layer by ion bombardment. We are requesting an atmospheric plasma in a down-stream configuration, which uses ions with lower kinetic energy and will change the surface state rather by chemical reactions than kinetic bombardment.

Frequently asked questions

What is the deadline to bid for this tender?
The submission deadline is 22 February 2024. Check the official source, as dates can be modified.
Who is the buyer of this tender?
The contracting authority is Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau (European Union).
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Data collected from official public procurement sources. Amounts as published by the buyer.