Maskless Aligner

Published

22 July 2025

Place of performance

Erlangen, DE252

Procedure

Open procedure

Lots

1

Notice number

00479528-2025

Reference

f5452d11-fb3c-4521-ab21-527e79f6465d

Official source

Official source

CPV codes

• 31712300Circuitos impresos

Description

In our research group, nanoscopic superconducting circuits are created using lithographic processes on 4-inch wafers. The structures are currently created on photomasks in a fixed design and then transferred to the substrate using photolithography. In order to significantly accelerate the design process of the superconducting circuits, we want to write the structures directly onto the substrate in the future using a maskless aligner.

Award criteria

• Price — Preis
• Quality — https://www.evergabe.bayern.de/evergabe.bieter/api/supplier/external/subproject/be1efe43-853e-4ecd-b9bd-14a37d41f5c4/awardcriteria

Awards

Official publications

• TED · 00479528-2025 · 22 July 2025
• OJS · 138/2025 · 22 July 2025

Other tenders from Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg

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• Spinning-disc Mikroskop · 4 July 2025
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• Mikro-PLE-Spektrometer mit durchstimmbarem Laser · 13 May 2025
• Maskless Aligner · 6 May 2025

Frequently asked questions

Who is the buyer of this tender?

The contracting authority is Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg (European Union).

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