Lieferung eines Atomic Layer Deposition system PEALD
Buyer: Karlsruher Institut für Technologie
- Published
- 27 January 2025
- Place of performance
- Karlsruhe, DE122
- Procedure
- Negotiated procedure
- Lots
- 1
- Notice number
- 00054782-2025
- Reference
- cc9af2a1-139c-4317-8073-446c6b05604a
- Official source
- Official source
CPV codes
- 42990000Máquinas diversas para usos especiales
Description
Gegenstand dieser Ausschreibung ist die Lieferung eines GEMStar XT-DP, Thermal and Plasma enhanced Atomic Layer Deposition system PEALD with dual manifold zones up to 8 precursors including 2 precursor bottles + heater jackets mit Glovebox interface für das Institute of Photonics and Quantum Electronics (IPQ) am KIT - Campus Süd, Karlsruhe.
Award criteria
- Quality — Siehe Vergabeunterlagen.
Awards
| Awarded to | Amount | Date |
|---|---|---|
| Euris GmbH | — | — |
Official publications
- TED · 00054782-2025 · 27 January 2025
- OJS · 18/2025 · 27 January 2025
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Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is Karlsruher Institut für Technologie (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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