Laser Based dicing Tool
Buyer: IMEC VZW
- Published
- 15 January 2024
- Procedure
- neg-w-call
- Lots
- 1
- Notice number
- 00025771-2024
- Reference
- 659bbf3c-c72b-42e3-a8d2-f520a462d1b1
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
The object is the supply and commissioning of equipment for the research and development of industrial scalability of various nanotechnological applications, more specifically a wafer singulation (dicing) tool (hereinafter referred to as: “the Tool”). The tool is designed to be able to singulate wafers by means of a laser-based technique and to edge trim by applying circular cuts. The wafers to be processed consist of copper, LowK or other metal or dielectic films.
Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is IMEC VZW (European Union).
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