Intellibat ALD Tool
Buyer: IMEC VZW
- Published
- 30 January 2024
- Procedure
- neg-w-call
- Lots
- 1
- Notice number
- 00060344-2024
- Reference
- 46afb1cb-92a4-43b0-bba2-ff5adb1298ea
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.
Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is IMEC VZW (European Union).
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