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Closed European Union SuppliesEU-funded

Intellibat ALD Tool

Buyer: IMEC VZW

Published
4 March 2024
Procedure
Negotiated procedure
Lots
1
Documents
1
Notice number
00131900-2024
Reference
46afb1cb-92a4-43b0-bba2-ff5adb1298ea
Official source
Official source

CPV codes

Description

The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.

Official publications

Other tenders from IMEC VZW

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The contracting authority is IMEC VZW (European Union).
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Data collected from official public procurement sources. Amounts as published by the buyer.