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Awarded European Union Supplies

IMS Chips - Europaweite Vergabe eines Dielektrika-Plasma-Ätzers zur Prozessierung von 150mm und 200mm Wafern

Buyer: Institut für Mikroelektronik Stuttgart Stiftung des bürgerlichen Rechts

Published
13 March 2024
Place of performance
DE111
Procedure
Negotiated procedure
Lots
1
Notice number
00152369-2024
Reference
f860e60a-a34f-4b40-993d-102cc4f96764
Official source
Official source

CPV codes

Description

Gegenstand des vorliegenden Vergabeverfahrens ist die Beschaffung eines Dielektrika-Plasma-Ätzers zur Prozessierung von 150mm und 200mm Wafern

Award criteria

Awards

Awarded toAmountDate
KLA Corporation €1

Official publications

Other tenders from Institut für Mikroelektronik Stuttgart Stiftung des bürgerlichen Rechts

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The contracting authority is Institut für Mikroelektronik Stuttgart Stiftung des bürgerlichen Rechts (European Union).
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Data collected from official public procurement sources. Amounts as published by the buyer.