III-V ICP Etcher
Buyer: Danmarks Tekniske Universitet - DTU
- Published
- 25 June 2025
- Submission deadline
- 13 August 2025, 21:55
- Place of performance
- Lyngby, DK012
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00410886-2025
- Reference
- 6027fd31-0077-4aee-8e35-7fe1fb5b1bd6
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
- 51430000Servicios de instalación de equipo técnico de laboratorio
Description
DTU requires a ICP reactive ion etcher to etch III-V materials with a special focus on etching GaAs micropillar devices from a planar microcavity (“the Instrument”). The system is expected to be delivered as soon as possible but at the latest in Q3 2026. The Instrument is to be the core instrument for a research project on optical devices. Besides that, it will be part of the shared open access instruments at the facility supporting research in micro and nano fabrication within optical devices and quantum computer developments. Therefore, DTU need a state-of-the-art instrument that can meet all current and future needs for etching III-V materials like GaAs, AlGaAs, InGaAs, AlInGaAsP and InP .
Award criteria
- Price — The price to be evaluated is the total price for the machines as well as the options, but not voluntary option, specified in Appendix 2 – Prices.
- Quality — DTU Nanolab will assess if the tender fulfils the specified evaluation requirements to sub-criterion “Quality of submitted samples”, and sub-criteria “Functionality and performance” is based on the…
- Quality — The performance evaluation is based on the returned samples: The provided samples shall show evidence of the Tenderers tool's capability of covering the processing requirements based on the process…
Official publications
- TED · 00410886-2025 · 25 June 2025
- OJS · 119/2025 · 25 June 2025
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Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 13 August 2025, 21:55. Check the official source, as dates can be modified.
- Who is the buyer of this tender?
- The contracting authority is Danmarks Tekniske Universitet - DTU (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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