ICP3 Ion etching system FIRST ETH Zurich
Buyer: ETH Zürich - Abt. Procurement & Export Services
- Published
- 18 March 2025
- Procedure
- Open procedure
- Lots
- 1
- Notice number
- 00173877-2025
- Reference
- bc0a3ccd-35a0-4853-9a03-2e217eab5db7
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
Delivery of a reactive ion etching system with inductively coupled plasma, consisting of a gas supply system for at least 9 gases, with process pressure up to 100 mtorr and gas flows up to 500 sccm, RF/ICP generators in the kW range with autotuning, spectroscopic monitoring of the plasma, automatic loading lock for fast loading, for sample sizes from 4 inch diameter, with sample temperature control in the range from 10 to 300 °C.
Award criteria
- Quality — Zuschlagskriterien
Awards
| Awarded to | Amount | Date |
|---|---|---|
| DE_Oxford Instruments GmbH | €482,245 | — |
Official publications
- TED · 00173877-2025 · 18 March 2025
- OJS · 54/2025 · 18 March 2025
Other tenders from ETH Zürich - Abt. Procurement & Export Services
- Two-photon 3D lithography printing system FIRST-CLA at ETH Zurich
- NMR spectrometer and components ETH Zurich (3 lots)
- NMR spectrometer and components ETH Zurich (3 lots)
- NMR spectrometer and components ETH Zurich (3 lots)
- Thin Film Cluster Deposition System for Sputtering of Metals and Dielectrics
- Assistance au projet «Optimisation du contrôle de gestion dans l’administration »
- Title of the procurement (also to arouse the interest of potential suppliers)
- Assurance responsabilité civile d'entreprise pour l'ETH Zurich au 01.01.2026
- All Risks Sach- und Betriebsunterbrechungsversicherung
- Intravital Microscopy (IVM) System
Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is ETH Zürich - Abt. Procurement & Export Services (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
Get alerts for tenders like this
Create a free account and receive new tenders from European Union matching your business, every day.
Create a free account and receive new tenders from European Union matching your business, every day.