ICP3 Ion etching system FIRST ETH Zurich

Published

8 October 2024

Submission deadline

14 November 2024, 12:00

Procedure

Open procedure

Lots

1

Documents

1

Notice number

00603732-2024

Reference

bc0a3ccd-35a0-4853-9a03-2e217eab5db7

Official source

Official source

CPV codes

• 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)

Description

Delivery of a reactive ion etching system with inductively coupled plasma, consisting of a gas supply system for at least 9 gases, with process pressure up to 100 mtorr and gas flows up to 500 sccm, RF/ICP generators in the kW range with autotuning, spectroscopic monitoring of the plasma, automatic loading lock for fast loading, for sample sizes from 4 inch diameter, with sample temperature control in the range from 10 to 300 °C.

Award criteria

• Quality — Zuschlagskriterien

Official publications

• TED · 00603732-2024 · 8 October 2024
• OJS · 196/2024 · 8 October 2024

Other tenders from ETH Zürich - Abt. Procurement & Export Services

• Two-photon 3D lithography printing system FIRST-CLA at ETH Zurich · 15 December 2025
• NMR spectrometer and components ETH Zurich (3 lots) · 1 December 2025
• NMR spectrometer and components ETH Zurich (3 lots) · 1 December 2025
• NMR spectrometer and components ETH Zurich (3 lots) · 1 December 2025
• Thin Film Cluster Deposition System for Sputtering of Metals and Dielectrics · 20 November 2025
• Assistance au projet «Optimisation du contrôle de gestion dans l’administration » · 19 November 2025
• Title of the procurement (also to arouse the interest of potential suppliers) · 7 November 2025
• Assurance responsabilité civile d'entreprise pour l'ETH Zurich au 01.01.2026 · 17 October 2025
• All Risks Sach- und Betriebsunterbrechungsversicherung · 24 September 2025
• Intravital Microscopy (IVM) System · 5 September 2025

Frequently asked questions

What is the deadline to bid for this tender?

The submission deadline is 14 November 2024, 12:00. Check the official source, as dates can be modified.

Who is the buyer of this tender?

The contracting authority is ETH Zürich - Abt. Procurement & Export Services (European Union).

How can I bid for public tenders in European Union?

Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.