FBH-02 Prior Information Notice – Wet Chemical Processing Tool (Single Wafer Etching)
Buyer: Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik
- Published
- 11 June 2026
- Estimated value
- €1,710,000
- Lots
- 1
- Notice number
- 00400550-2026
- Official source
- Official source
CPV codes
- 42990000Máquinas diversas para usos especiales
Description
The Ferdinand-Braun-Institut (FBH) plans to procure a wet chemical processing tool for single wafer etching within the framework of the EU-funded APECS programme. The system is intended for the processing of compound semiconductor materials such as InP, GaAs, AlGaAs, and GaN. The tool will enable highly precise and reproducible etching processes on a per-wafer basis, including endpoint detection functionality. Compared to batch processing, the single wafer approach ensures improved process control and reproducibility, which is essential for low-volume, high-precision semiconductor manufacturing. The equipment will be installed in an existing cleanroom environment and must be compatible with ISO class 5 requirements. The procurement procedure is planned for 2026.
Frequently asked questions
- What is the estimated value of this tender?
- The estimated value published by the buyer is €1,710,000.
- Who is the buyer of this tender?
- The contracting authority is Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik (European Union).
Create a free account and receive new tenders from European Union matching your business, every day.