FAB FIB SEM
Buyer: Imec EU Pilot line NV
- Published
- 28 October 2025
- Place of performance
- BE242
- Procedure
- Negotiated procedure
- Lots
- 1
- Notice number
- 00710774-2025
- Reference
- 4b35577c-1bee-4d20-ba36-c535c61a03b8
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
We are looking for a 300mm wafer ultra-high resolution focused ion beam scanning electron microscope (FIB-SEM) system. The tool should allow for nanometer scale imaging of a cross-section and preparation of precise located and thin TEM lamellae. End-pointing of the cross section as well as location for the TEM lamella needs to be precise within nanometer range on a specific structure. Final achieved thickness of TEM lamella Is required below 30nm to provide minimal overlap within lamella thickness, while still being crystalline and uncontaminated, ready for TEM inspection. The tool needs to be able to load 300mm wafers and have a possibility to load multiple TEM grids on the stage. Grid position needs to allow for lamella preparation in multiple orientations. In-system gas injection for carbon and tungsten deposition is required. In order to increase speed for our current workflow, the tool needs to be able to use automation to perform cross-section analysis and prepare TEM specimen.
Award criteria
- Price — Zie besteksdocumenten
Awards
| Awarded to | Amount | Date |
|---|---|---|
| FEI EUROPE BV - Branch Belgium | €0 | — |
Official publications
- TED · 00710774-2025 · 28 October 2025
- OJS · 207/2025 · 28 October 2025
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Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is Imec EU Pilot line NV (European Union).
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