DRIE etch cluster (Mainframe + 3 Chambers) (IPMS-MRS07.1; IPMS-MRS07.2; IPMS-MRS08.1; IPMS-MRS08.2) - PR882587-2480-P
Buyer: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau
- Published
- 20 July 2026
- Place of performance
- Dresden, DED21
- Procedure
- neg-w-call
- Lots
- 1
- Notice number
- 00500959-2026
- Reference
- 16cd6b5a-0dcb-4fc9-b5f2-a81ac88a965b
- Official source
- Official source
CPV codes
- 42990000Máquinas diversas para usos especiales
Description
DRIE etch cluster (Mainframe + 3 Chambers) (IPMS-MRS07.1; IPMS-MRS07.2; IPMS-MRS08.1; IPMS-MRS08.2)
Awards
| Awarded to | Amount | Date |
|---|---|---|
| KLA Corporation | €-1 | — |
Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Einkauf B12 - Vergabestelle Bau (European Union).
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