Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
Buyer: Danmarks Tekniske Universitet - DTU
- Published
- 11 September 2026
- Submission deadline
- 15 October 2026, 21:55
- Place of performance
- Kgs. Lyngby, DK013
- Procedure
- Open procedure
- Lots
- 1
- Documents
- 1
- Notice number
- 00628101-2026
- Reference
- 3f758954-4e93-40e3-954b-d4f8b1299542
- Official source
- Official source
CPV codes
- 42000000Maquinaria industrial
- 38636110Láseres industriales
- 38810000Equipo de control de procesos industriales
Description
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.
Award criteria
- Price — Based on the offered prices
- Quality — Based on the tenderers answers to Appendix 1
Official publications
- TED · 00628101-2026 · 11 September 2026
- OJS · 176/2026 · 11 September 2026
Other tenders from Danmarks Tekniske Universitet - DTU
Frequently asked questions
- What is the deadline to bid for this tender?
- The submission deadline is 15 October 2026, 21:55. Check the official source, as dates can be modified.
- Who is the buyer of this tender?
- The contracting authority is Danmarks Tekniske Universitet - DTU (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
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