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Awarded European Union SuppliesEU-funded

BRIGHTFIELD INSPECTION TOOL

Buyer: Imec EU Pilot line NV

Published
30 September 2025
Place of performance
BE242
Procedure
Negotiated procedure
Lots
1
Notice number
00637257-2025
Reference
6fbf4cc9-b97e-4e65-a482-042379e354c7
Official source
Official source

CPV codes

Description

This tender is a public supply contract within the meaning of Article 2 of the Public Procurement Act of 17 June 2016, Belgian Official Gazette 14 July 2016. Its object is the supply and commissioning of a Brightfield Inspection Tool. This tool is used to automatically detect nanometer-sized defects and pattern deviations on 300mm wafers as part of advanced CMOS process development and process monitoring. Such fast and highly accurate inspection of defects on wafers, for example after lithography, etching or material deposition steps, therefore plays a crucial role in the development of the next generation of transistors and chips for processor and memory applications, as well as in optimizing the yield per wafer.

Award criteria

Awards

Awarded toAmountDate
KLA Corporation €0

Official publications

Other tenders from Imec EU Pilot line NV

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Data collected from official public procurement sources. Amounts as published by the buyer.