BEOL ETCH PLATFORM
Buyer: Imec EU Pilot line NV
- Published
- 30 September 2025
- Place of performance
- BE242
- Procedure
- Negotiated procedure
- Lots
- 1
- Notice number
- 00637811-2025
- Reference
- 139628b8-0ccd-4ef5-b51e-fcc46917213a
- Official source
- Official source
CPV codes
- 38000000Equipo de laboratorio, óptico y de precisión (excepto gafas)
Description
Its object is the supply and commissioning of a new BEOL Etch Cluster. • 300mm Dry Etch/Strip Platform containing 3 Process Modules as described below: • Metal Dry Etcher capable of Metal, Metal Oxides and various HM (Hard Mask) etches • Deep Si Etcher capable of TSV (Through-Silicon Via) • Dry Stripper or Asher with water vapor passivation capability These Process Modules are targeted for various BEOL Applications from legacy technology nodes up to N3 and beyond. The contract will be awarded based on the best quality-price ratio, the award criteria will be further detailed in the tender documents.
Award criteria
- Cost — Prijs
Awards
| Awarded to | Amount | Date |
|---|---|---|
| LAM Research International | €0 | — |
Official publications
- TED · 00637811-2025 · 30 September 2025
- OJS · 187/2025 · 30 September 2025
Other tenders from Imec EU Pilot line NV
- Digital tester setup
- Frame agreement for design, construction and installation of a cleanroom
- Optical Metrology & Inspection for BEOL
- Bevel Treatment Platform
- High NA EUV Scanner
- Electrical Measuring Equipment for Parametric Testing
- Frame agreement for design, construction and installation of a cleanroom
- Supply of a High Temp Resist Strip Tool
- EUV MASK CLEANER
- Frame agreement for design, construction and installation of a cleanroom
Frequently asked questions
- Who is the buyer of this tender?
- The contracting authority is Imec EU Pilot line NV (European Union).
- How can I bid for public tenders in European Union?
- Bids are submitted through the official procurement portal of European Union. El Vínculo helps you find tenders and analyse their documents; submission always happens at the official source.
Get alerts for tenders like this
Create a free account and receive new tenders from European Union matching your business, every day.
Create a free account and receive new tenders from European Union matching your business, every day.